Piezo stage for laser micromachining

The QFOCUS QF-50 piezo nanopositioning stage for microscope objective and optics positioning offers subnanometer resolution.

Content Dam Ils Online Articles 2017 07 Aerotech Qf 50 002

The QFOCUS QF-50 piezo nanopositioning stage from Aerotech (Pittsburgh, PA) for microscope objective and optics positioning offers 400μm closed-loop and 450μm open-loop travel, high speed, 0.01% linearity, subnanometer resolution, and 4nm bidirectional repeatability. The stage accommodates optical instruments and next-generation laser micromachining applications. The stage is guided by precision flexures optimized using finite element analysis, with straightness errors to 40nm throughout the entire travel range. Its capacitive sensor design allows for subnanometer resolution and high linearity. It is available with a clear aperture of 29mm as standard, with custom stage designs, travels, and threaded adapters also available.

For more information, please visit www.aerotech.com.

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