Sascha Brose

Group Manager, EUV Technology at the Chair for Technology of Optical Systems, RWTH Aachen University
https://www.tos.rwth-aachen.de

Sascha Brose is Chair for Technology of Optical Systems at RWTH Aachen University (Aachen, Germany).

More from Sascha Brose
FIGURE 1. The pulsed EUV source at the Fraunhofer ILT delivers 40 W at 13.5 nm in ± 1% bandwidth.
Making nanostructures with a small EUV system
Periodic structures down to 28 nm can be produced using a compact EUV source and relatively simple process technology.
Feb 24th, 2021