Serhiy Danylyuk

Team Leader, EUV and DUV Technology at Fraunhofer ILT

Serhiy Danylyuk is Team Leader, EUV and DUV Technology at the Fraunhofer Institute for Laser Technology (Fraunhofer ILT; Aachen, Germany).

Feb. 24, 2021

Periodic structures down to 28 nm can be produced using a compact EUV source and relatively simple process technology.