Aerotech, Pittsburgh, Penn., has introduced the AVS1000 series stages, which are useful for applications that require positioning of large or heavy loads over very small incremental movements in elevation above a horizontal plane. The low profile and precise motion capability make these stages good for use in semiconductor manufacturing and inspection, automated tool alignment, machine vision inspection systems, and laser machining applications.
The AVS1000 series provides precise elevation of a load in a vertical plane using a moving-wedge design. The precision machined wedge block converts horizontal movement from a precision-ground ball screw into vertical elevation of the AVS1000 series tabletop. AVS1000 performance includes exceptional resolution (5 nm) and accuracy (±1 µm), with the ability to apply this performance to large loads up to 135 kg.
Sealed linear motion guide bearings with integral wipers are incorporated to provide good payload capability, long life, and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is assured. Careful design of the wedge angle and bearing system allows the AVS1000 series to achieve submicron resolution and still maintain a compact profile.