ZeGage™ Pro 3D Optical Profiler

The ZeGage™ Pro and ZeGage™ Pro HR 3D optical profilers provide non-contact measurement and characterization of micro- and nano-scale features of virtually any surface, and set the new standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers.

The base ZeGage™ Pro model delivers surface mapping at the nanometer scale, meeting the needs for most industrial surfaces. For smoother samples, with a much finer surface finish, the ZeGage™ Pro HR offers more than 20X higher precision with 0.15 nm vertical precision.

ZYGO's ZeGage™ products have been taking interferometric surface profiling out of the lab and into production for nearly a decade. With the ZeGage Pro and Pro HR systems, powerful and trusted capabilities such as SureScan™ technology for vibration robust metrology are now paired with ZYGO's exclusive Part Finder and Smart Setup tools to make sample changes fast and easy, minimizing wasted time and maximizing throughput.

Like all earlier ZeGage™ profilers, the ZeGage™ Pro and Pro HR systems are constructed with a compact benchtop-friendly design. Coupled with SureScan™ technology, there is no need for expensive vibration isolation tables, system enclosures, or consumables. They also run ZYGO's interactive control software, Mx™, for easy and detailed visualization to help you control your process.
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