RPMC Lasers announces DPSS laser series from Actinix

ILS_2012_2_RPMC_2

RPMC Lasers Inc., O'Fallon, Mo., has announced the addition of a series of <200 nm DPSS lasers from Actinix. The Model 3193 is an industrial solid-state laser emitting at the 193 nm wavelength producing 1 μJ of pulse energy and 5 mW of average power with rep rates up to 5kHz and pulse widths of 8 ns to 10 ns. This laser also provides good beam quality with an M2 <1.2.

The Model 1000 is a tunable deep UV nanosecond laser source operating in the regime below 200 nm with a tuning range of 3 nm. This laser provides >1 mJ of pulse energy and pulse widths of 6 ns to 8 ns at 195 nm with rep rates up to 10 Hz. There is also an option for the Model 1000 to deliver 25 mJ at 213 nm.

Applications for these novel lasers include photomask phase metrology, interference lithography, and biotechnology.



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