Coherent introduces IndyStar 2 kHz excimer laser

Coherent Inc.  has added a new model to its IndyStar family of compact excimer lasers that offers higher repetition rate (2 kHz) for increased throughput.

In addition, the fully Semi S2-certified IndyStar 2 kHz laser incorporates several new output stabilization features for improved processing, making them good for use in semiconductor fabrication, testing, inspection and micromaterials processing facilities. The new IndyStar 2 kHz is offered with a choice of 193 nm (ArF) output where it delivers 8 W of stabilized power or 248 nm (KrF) output with 12 W of stabilized power.

The new IndyStar uses an advanced electronics platform enabling two new stabilization features called POWERLOK and TIMELOK. The POWERLOK feature ensures constant pulse energy of each single laser pulse, actively stabilized particularly for applications using bursts of pulses or specific pulse trains. TIMELOK provides superior trigger-to-pulse delay stability, supporting tight synchronization with other equipment.


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