Excimer laser micromachining

The LEAP excimer laser from Coherent Inc. (Santa Clara, CA; www.Coherent.com) offers a combination of output power, low purchase price, and economical operating cost for micromachining applications in microelectronics and medical device manufacturing. In particular, the LEAP is primarily intended for cost sensitive, throughput critical micro-manufacturing tasks such as for small and functional devices with smart functions (electrical, chemical, biological) and micro fluidic parts.

The LEAP utilizes the Novatube construction and discharge design to provide low operating cost per watt. The direct UV laser emission of the LEAP delivers a per pulse energy of 650 mJ at repetition rates of up to 200 Hz (for an average power of 130W), at wavelengths of either 248 nm or 308 nm.

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